JPS6231861U - - Google Patents
Info
- Publication number
- JPS6231861U JPS6231861U JP12452585U JP12452585U JPS6231861U JP S6231861 U JPS6231861 U JP S6231861U JP 12452585 U JP12452585 U JP 12452585U JP 12452585 U JP12452585 U JP 12452585U JP S6231861 U JPS6231861 U JP S6231861U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- charged particle
- particle beam
- sample surface
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12452585U JPS6231861U (en]) | 1985-08-12 | 1985-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12452585U JPS6231861U (en]) | 1985-08-12 | 1985-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6231861U true JPS6231861U (en]) | 1987-02-25 |
Family
ID=31016616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12452585U Pending JPS6231861U (en]) | 1985-08-12 | 1985-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231861U (en]) |
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1985
- 1985-08-12 JP JP12452585U patent/JPS6231861U/ja active Pending